variable capacitor

Low voltage RF MEMS variable capacitor with linear CV response

1 min read · Fri, Apr 27 2012

RF MEMS variable capacitor PolyMUMPS

Amro Elshurafa, et al., "Low voltage RF MEMS variable capacitor with linear CV response." Electronics letters 48 (7), 2012, 392.. An RF MEMS variable capacitor, fabricated in the PolyMUMPS process and tuned electrostatically, possessing a linear capacitance-voltage response is reported. The measured quality factor of the device was 17 at 1 GHz, while the tuning range was 1.2:1 and was achieved at an actuation DC voltage of 8 V only. Further, the linear regression coefficient was 0.98. The variable capacitor was created such that it has both vertical and horizontal capacitances present. As the